Yanchuk I. Correlation between structural features of carbon-based materials and their optical and mechanical properties.

The complex investigation of the effect of carbon-based materials growth condition and modification on their crystalline quality, optical and mechanical properties have been presented. Polycrystalline diamond, amorphous diamond-like carbon and nanoporous carbon have been investigated. Raman scattering and electrical resistance measurement have been used as main experimental techniques. It is shown that pre-deposition of diamond nanoprecursors on the wafers increase crystalline perfection and hardness. It is demonstrated that amorphous carbon films microstructure consist of chaotic distorted sp2 aromatic rings. During thermal annealing non distorted aromatic rings are created. It is found that boron doping during deposition of carbon films tend to decreasing of graphitic-like clusters nucleation in amorphous sp2-phase; Nitrogen in hydrogenised carbon films during ion implantation promote conversation dandling sp3- bonds to sp2-aromatic rings. It is demonstrated that dominate contribution to Raman scattering in nanoporous carbon give non-distorted sp2-sixfold aromatic clusters. Their size are estimated by Ferrari-Robertson amorphisation trajectory. Кeywords: diamond-like amorphous carbon films, nanoporous carbon, Raman spectroscopy, electrical resistance anisotropy.