Mazunov D. Phase transformations in silicon oxide films due to change of oxygen structural arrangement

Українська версія

Thesis for the degree of Candidate of Sciences (CSc)

State registration number

0405U002199

Thesis Registration Form

0405U002199.pdf

Applicant for

Mazunov Denis Olegovich

Specialization

01.04.07 - Фізика твердого тіла

Date of defense

24-05-2005

Specialized Academic Board

К 26.199.01

Essay

The comprehensive investigation of the effect of phase-structural transformations in silicon oxide films has been presented. It is established that after high temperature treatment slightly oxidized Si-Oy-Si4-y molecular complexes lose oxygen atoms transforming to Si-Si4 tetrahedra. Simultaneously, oxygen atoms released interact with heavily oxidized silicon-oxygen complexes transforming them to Si-O4 tetrahedra. As a result, segregation of the Si and SiO2 phases takes place in matrix.

Thesis supervisor

Lisovskyy Igor Petrovich

Official opponents

Скришевський Валерій Антонович
Братусь Віктор Якович

Files

aref.doc

dis.doc

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