Holovatyy A. Computer-aided design of microelectromechanical angular velocity sensors

The dissertation work is dedicated to the solution of the important scientific task - the development of mathematical models of mechanical elements of the microelectromechanical angular velocity sensor, VHDL-AMS models of microelectromechanical tuning-fork and gimbal angular velocity sensors on the schematic level of computer-aided design, improvement of electrical circuit for coupling of the micromechanical and electrical node of the MEMS sensor, development of information and linguistic tools for the computer-aided design systems of microelectromechanical angular velocity sensors (MEMS gyroscopes).