Turbin P. Physical-mechanical properties nanocomposites coatings of the base Zr, Ti, Si and N, obtained by vacuum-arc deposition

Українська версія

Thesis for the degree of Candidate of Sciences (CSc)

State registration number

0411U003972

Applicant for

Specialization

  • 01.04.07 - Фізика твердого тіла

27-05-2011

Specialized Academic Board

Д 55.051.02

Sumy State University

Essay

Coatings were fabricated using vacuum-arc deposition from unit-cast Zr-Ti-Si targets. Deposition was carried out using standard vacuum-arc and HF deposition methods. Analyzing phase composition of the base Zr, Ti, Si and N films, we found that a basic crystalline component of as-deposition on state was solid solution (Zr, Ti)N based on cubic lattice of structured NaCl. Phase composition of ion-plasma films under temperature of vacuum annealing lower than 1450 K remained practically unchanged, corresponding to post as-deposition state. An average crystallite size of solid solution (Zr, Ti)N also remained practically unchanged. Hardness was H = 40.8 GPa; E = 392 GPa. 870 K annealing increased H and E and decreased spread in hardness values, for example, H = 48 GPa and E = 456 GPa.

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