The object of research is a design of technological processes for the production of MEMS accelerometers. The purpose of the work is to increase the efficiency of the automated design of technological processes for the MEMS accelerometers production by reducing the cost and time of their design and production, through the development and improvement of mathematical models, methods and software. Research methods are: mathematical and computer modeling, methods of classification, computational intelligence, discrete programming, optimization, mathematical logic, set theory, graph theory, numerical methods, simulation methods, algorithm theory, methods for organizing a graphical dialog for constructing a user interface. Practical results – in the dissertation work models and methods are developed and improved, which have allowed to solve an important scientific task of increasing efficiency of the automated design of technological processes for the MEMS accelerometers production. The scientific novelty of the obtained results are the next: for the first time a mathematical model for determining of the MEMS accelerometer-analogs was developed, for which the criteria of production time and cost, and the MEMS accelerometer mass and area were formalized, and the functional-constructive constraints for MEMS accelerometer were taken into account, which allows to determine the best version of the MEMS accelerometer-analogue for the typical technological process choice; for the first time a generalized method for automated design of technological processes MEMS accelerometers production has been developed, which is based on two partial methods: the choice of typical technological processes and the search for analogues of technological process individual elements, which allows obtaining an efficient technological process by reducing the production cost and time; the model of structural-parametric synthesis of the technological process for MEMS accelerometers production is improved, which, unlike the known ones, by choosing the typical technological process, operations and equipment, allows obtaining the structure of the technological process and, if necessary, to choose more efficient technological equipment; the method of selecting typical technological process for MEMS accelerometers production is improved, which is different from existing methods by the fact it is based on methods of hierarchical clustering and data mining methods, and allows to determine the relationship between functional and constructive indicators of MEMS accelerometer-analogue and of a typical technological process and to reduce the designing cost and time. The results of the dissertation research are implemented to production process at enterprise OOO «Oven» and to education process at the Kharkiv National University of Radio Electronics, Zaporozhye National Technical University, Kremenchuk Mykhailo Ostrohradskyi National University. On the base of dissertation results the author's certificate for software No. 65348 dated 16.05.16 was received. The obtained results can be used for automated design of technological processes for MEMS accelerometers production with further obtain of technological documentation in the form of a route map.
