Kravchenko Y. Structure and properties of nanoscale multilayered and multielemental coatings based on (TiAlSiY)N/MeN (Me=Mo, Cr, Zr)

The dissertation is devoted to the detection of features of synthesis processes, elemental and phase composition, substructure and properties of multi-element and multilayer nano-scale coatings (TiAlSiY)N /MeN (Me = Mo, Cr, Zr) synthesized by the vacuum-arc deposition method. The determination of the interrelations between the structure and mechanical and tribological properties of the coatings is done. It is established that the composition and crystal structure of multi-element nitride layers in single-layer and multilayer coatings are similar: solid solutions based on cubic TiN with a crystal lattice of the NaCl (B1) structural type are formed. The binary layers of CrN and ZrN also have the fcc structure of the NaCl type, while the formation of δ-MoN phase with a hexagonal crystal structure is observed in Mo layers. The multilayer (TiAlSiY)N/MoN coating exhibit the highest values of nanohardness and Young's modulus of 36 GPa and 406.8 GPa, respectively, which is 1.5 times higher than the corresponding values for Cr and Zr coatings. These enhancements are primarily due to the smallest values of modulation period of the layers for these samples and the grain size in combination with the most clearly defined interfaces between the layers of the composition