Dobrozhan A. Influence of ionizing radiation on the structure and properties of cadmium sulphide and cadmium telururide film heterosystems obtained by DC magnetron sputtering

The dissertation is devoted to the creation of physical and technological bases of obtaining sulfide and cadmium telluride film layers by a direct current magnetron sputtering method for the creation of film solar cells based on them and to the research of ionizing radiation influence on structure and optical properties of these films and output parameters, light diode characteristics of film solar cells made on them. For the first time, the production of wide-band semiconductors thin-film layers, which have low conductivity at room temperatures, by the method of DC magnetron sputtering has been substantiated and implemented. The method has been implemented by heating the target surface to intensify the thermal radiation of secondary electrons in the magnetron discharge zone and reduce the electrical resistance of the target as a result of thermal generation of the main charge carriers at semiconductor target temperatures of 156-166°C. This prevents the accumulation of charge on the target and achieves sputtering speeds 10 times higher than RF magnetron sputtering values.