Object of the study: is the process of formation of single- and multilayer nitride coatings (TiN, ZrN and multilayer TiN / ZrN), their structure and properties, which are obtained by vacuum-arc deposition on non-orienting substrates in a nitrogen atmosphere. Objective: is the regularities of the influence of constant potential, high-voltage potential in pulsed form and pressure of nitrogen atmosphere on the formation of nanoscale structure, substructure and mechanical properties of vacuum-arc nitride coatings.. Methods: The study of the structure and phase composition of the study samples was carried out by methods of optical, electron microscopy, X-ray diffraction analysis. The elemental composition was determined using the X-ray fluorescence method and energy-dispersive X-ray spectroscopy (EDS). Mechanical tests of materials were performed in the microindentation mode, in particular - active load, using the Berkovich pyramid (installation according to ISO 14577). The parameters of wear resistance were determined. Theoretical and practical results, scientific novelty: Scientific novelty of the obtained results: physical mechanisms are proposed in the formation of a new phase (TiN, ZrN), when radiation damage occurs and at the same time the process of relaxation of structural defects, which are realized under the action of heat fluxes. Depending on the intensity and duty cycle of high-energy impact, the corresponding axial textures, internal stresses, and, as a consequence, a change in functional properties are formed. A study of the complex effect of constant (Uc) and pulse (Ui) displacement potentials in comparison with the action of only Uc or Ui. It is shown that in the multiparameter problem the maximum of properties corresponds to the comparison of processes of damage accumulation and their relaxation, which correspond to the values of constant potential -200 V, pulse potential -850… -1000 V and duration of pulse potentials (τ) 7 - 10 μs. It is established that especially the textural state and defects affect the mechanical properties of coatings, namely nano- and microhardness and this value reaches the level of 42 - 45 GPa. Modeling (TRIM program) of penetration depth and number of vacancies for all cascade damages was performed. It is shown that the distribution of vacancies changes along the depth of the layer due to radiation damage, but the mixing of layers for multilayer composites does not occur, although the depth of penetration of Zr ions is greater (h = 63 A) than that of Ti ions (h = 52 A). with atomic dimensions and mass of these two elements. For the first time it is shown that due to the creation of radiation damage and their relaxation there is not only the optimum hardness, but also wear resistance. Thus, high-speed coated tools obtained under the above conditions (Ui = -1000 V, τ = 10 μs, Uс = -200 V), more than 3 times increase the service life (performance) of the cutting edge, which contributes to the optimal values of substructural characteristics and macrostresses (ε ≤ -2%).
