Opanasyuk N. Size-kinetics effects in thin films Cr, Cu and Co with low concentration of defects of a crystal structure

Українська версія

Thesis for the degree of Candidate of Sciences (CSc)

State registration number

0499U001375

Thesis Registration Form

0499U001375.pdf

Applicant for

Specialization

  • 01.04.07 - Фізика твердого тіла

27-05-1999

Specialized Academic Board

Д 55.051.02

Sumy State University

Essay

The dimensional dependence of the thermal coefficient of resistance (TCR) and strain sensitivity coefficient (SSC) in films was studied. The approbation and comparison of linearized Mayadas-Shatzkes model, isotropic and tree dimensional model of Tellier-Tosser-Pichard for TCR and SSC were carried out. The parameters of transfe rence of the films: R, r, p. Mass - spectrometry, electronоgraphy, electronic microscopy, measurement stresses, electromeasurement. Field of application of research – microelectronics.

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