Petrenko V. Automation of controlling technological processes for solid Cz-Si-monocrystals production

The thesis deals with the solving of scientific-practical problem - to increase the efficiency of producing solid Cz-Si-monocrystals by developing and introducing organizational and technological system of technological process control of loading arrangements, monocrystals bars growing and treatment on the synthesized models basis, adaptive algorithms and program technical tools of controlling multimeasuring stochastic and non-stationary technological processes.The task of optimum loading arrangements was formalized, the scheme of its solving on the basis of genetic algorithm for minimization of supernormative silicon raw usage was offered. The algorithmic and program means of synthesis for "transmitting function+noise" combined models which implement the stages of structural and parametrical models' authentication and diagnostic verification were developed, as well as regulators on the basis of these models were synthesized. The new method for monocrystal growing and the device for its implementationwere developed, which are based on measuring the meniscus parameters and fusion levels in crucible by processing the representation of crystallization zone obtained from the camcorder. The adaptive procedure of ingots' facing, the model and algorithm for solving the task of optimum ingots' cutout were developed. The conception of complex automation control for technological processes of producing solid Cz-Si-monocrystals was presented, the mathematical models and algorithms for controlling technological processes are used as a basis for developed OTSU production of solid Cz-Si- monocrystals