Puha V. Synthesis, structure, properties of films deposited from ion and molecular flows of C60

Object: effects and physical phenomena that determine the features of the formation of structure, substructure and phase composition of fullerite C60 films. The purpose: development of fundamentals of structure formation during film deposition from molecular and ion fullerene C60 fluxes in a wide range of energies from 0.01 to 10000 eV. Methods: mass spectrometry, electron-optical and X-ray methods, Raman scattering, X-ray photoelectron spectroscopy, tunneling and atomic force microscopy, nanoindentation. Results: with utilization of accelerated ions C60 a new carbon material is synthesized with a hardness of H ~ 50 GPa, conductivity of up to 104 S/m and H/E ~ 0,14 (E - Young's modulus). This new material consists of graphite nanocrystals and amorphous diamond matrix. The possibility to control the orientation of graphite nanocrystals by changing the angle of the ion beam deposition is shown. The structural phase diagram is plotted as a function of deposition temperature and C60 ion energy. Additional assisting by Ar+ in the process of film deposition shifts the beginning of structural changes to lower temperatures. Field of application: solid state physics, physics of thin films, nanophysics