Kosminska Y. Self-organization of structural and morphological characteristics and formation conditions of micro- and nanosystems

The thesis is devoted to determination and systematization of mechanisms and regularities of low-dimensional systems self-assembly for weakly volatile Al, Ag, Cu, Ni, Ti and Si within self-organized quasi-equilibrium steady-state conditions under direct action of low-temperature plasma onto a growth surface in highly pure inert ambient. The concept of complete self-organization systems is formulated and experimentally realized for the first time which consists in interdependent dissipative self-organization of quasi-equilibrium steady-state condensation conditions and conservative self-organization of low-dimensional structure growth on substrates. Self- 32 organization of structure formation is determined by a critical energy position in the range of atom binding energies with the growth surface depending on the supersaturation of deposited vapours, as well as by Ostwald ripening at high enough density of active nucleation centres, competitive contributions of growth surface temperature, Gibbs – Thomson effect, structural and field selectivities.