Vasin A. Structural and optical properties of the amorphous carbon films

It had been established that graphitelike nanockystallites dimension and optical band gap in amorphous hydrogenated carbon films inversely proportional to hydrogen content. The slope of the absorption edge is determined by the graphitelike nanocrystallites dimension and their imperfection. Compressive stress in hydrogenated carbon films are generated by transformation of dense and unstable diamondlike fraction into more stable graphitelike structure. Influence of the ion bombardment during deposition process is manifested in tow competed processes: 1 - ordering of the graphite like structure due to increasing of the adsorbed carbon atoms and 2 - clusters and creation of the radiation defects under ion bombardment. Besides ion bombardment determines graphitelike nanocrystallite orientation distribution and promotes film surface smoothing. It was established that energetic position of the CKVV line peculiarities of the auger-electron spectra and optical band gap of the а-Si1-xCx films are correlated.