Korbets'kyj O. Models, methods and software tools for computer-aided design of the gas-phase operation "diffusion" in the "open-flow" multi-wafer reactor

Research object – gasphase operation "diffusion" in "open- flow" reactor. Aim – development of models, methods and modelling algorithms of gasphase operations making integrated circuits (ІС), their realization in appearance of program- methodical complex. Researches methods: apparat of computing mathematics and mathematical physics, applied and system programming. Theoretical result – complex approach for modelling of gasphase operations attached to ІС manufactu- ring. Practical result - rising of modelling accuracy of technological gasphase operations. Economic effect – economy material and power resources in act of design and improving of technological process. Spheres uses – enterprise and scientific establishments, which attend to design and production ІС,higher education.