Cobol' O. The peculiarities of structure and stress state of tungsten and tungsten carbide ion plasma condensates

Українська версія

Thesis for the degree of Candidate of Sciences (CSc)

State registration number

0401U003163

Thesis Registration Form

0401U003163.pdf

Applicant for

Specialization

  • 01.04.07 - Фізика твердого тіла

02-11-2001

Specialized Academic Board

Д64.051.03

Essay

The dissertation is devoted to investigation of structure formation of tungsten and tungsten carbide ion-plasma condensates, as well as their thermal stability in temperature range 300-1500 K. Tungsten and tungsten carbide films were produced by ion-sputtering process using magnetron and triode schemes. The effects the main deposition parameters were analysed. The following general regularities for ion-plasma methods were ascertained: (1) high strain level in crystallites growing under condensation; (2)preffered crystallite orientation and crystallite size on deposited particle flux density, substrate temperature and sputtering potential.

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