Balovsyak S. Diagnostics of surface of solids in the case of total external reflection of X-ray

Українська версія

Thesis for the degree of Candidate of Sciences (CSc)

State registration number

0403U003293

Applicant for

Specialization

  • 01.04.07 - Фізика твердого тіла

26-09-2003

Specialized Academic Board

Д 76.051.01

Essay

The new principles of reconstruction of relief and structural surface parameters of solids by methods of experimental integral and differential curves of X-ray total external reflection was developed. The test GaAs and SiO2 samples, for which average deviation of heights are 0,26nm<Ra<4,39nm and their space period are 0,4mkm<Tm<11,9mkm, have been investigated by the methods of the atomic-force microscopy. The fractal approach for description of shape of the differential curves and surface profiles was used.

Files

Similar theses