Reshetnyak E. Stress state and structure of ion-plasma condensates with hexagonal and cubic lattice.

Object of study - thin films of Ti, W, Ti-N. Cr-N, Ti-Cr-N with thickness from 1 to 104 nm condensed by magnetron and vacuum-arc methods; аim - studying the structure and stress state of ion-plasma films, analysis of condensed particle average energy influence on film structure and mechanism of residual stress formation; мethods - X-ray structure analysis, X-ray fluorescence analysis electron microscopy; results, novelty - high compressive stresses (0,5?5 GPа) non-uniformly distributed by thickness of ion-plasma films and lattice parameters increased comparing to nominal ones were revealed. A correlation between stress state, lattice elastic distortion relaxation and texture formation was determined. The influence of condensed particle average energy on film residual stress was analyzed. The model of residual stress formation in ion-plasma condensates was proposed. А technique for studying the stress state in single-crystalline and textured materials with hexagonal lattice was developed, which allowedsimultaneous determination of macrostresses ((1,(2) and crystalline lattice parameters corresponded to non-stressed crystal (aо,cо); field of implementation - thin films physics.