Oleksiyenko S. Solid phase welding of single-crystal silicon with borosilicate glass

The thesis is devoted to development of procedure of determination of optimal time of electrochemical welding of silicon with glass in manufacturing of semiconducting pressure transducers. The speed of forming of joints depends on the peak value of density of current of welding, which at invariable welding voltage depends on the roughness of contacting surfaces and on ratio of nominal contact area of parts to general perimeter of side surfaces of the tubular glass part. The value of electrostatic compression forces is determined by ratio of welding voltage drop across a contact resistance to size of air gap between welding surfaces at the initial moment of application of welding voltage. The new procedure of determination of welding time during welding process has been developed. For increment of joints strength it is required to minimize the ratio of nominal contact area to general perimeter of side surfaces of the tubular glass part. The new manufacturing process of multilayered joints as silicon-glass-silicon during single welding cycle has been developed.