Zamulko S. FORMATION OF SILICIDE PHASES AT THE REACTIONARY DIFFUSION IN "FILMS LAYERS (5 - 30 nm) TI, NI - MONOCRYSTAL SILICON" SYSTEMS
Українська версіяThesis for the degree of Candidate of Sciences (CSc)
State registration number
0406U001434
Applicant for
Specialization
- 05.16.01 - Металознавство та термічна обробка металів
20-03-2003
Specialized Academic Board
K26.002.12
Essay
Files
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