Penkov O. Interlayer mixing in nanoscale molybdenum-silicon based multilayer coatings during irradiation and heating

The object of study: the study of mechanisms of ion-beam mixing and diffusion in molybdenum-silicon based multilayer coatings during irradiation and heating; research of the features of ion-beam mixing and diffusion is in multilayer coatings with barrier layers. The aim: the determination of features of ion-beam and diffusion mixing in Mo/Si based nanoscale multilayer coatings and development of radiation resistant x-ray mirrors. The methods of the investigations: x-ray difractometry, grazing angle x-ray difractometry, x-ray difraction simulation, transmision electron microscopy, x-ray photoelectron spectroscopy. Results, novelty: The processes of ion-beam mixing are explored in Mo/Si multilayers during irradiation by 40keV He ions up to 4·1016cm-2 irradiation dose. Two temperature regimes (weak and strong dependence of mixing versus irradiation temperature) are observed. Activation energies are determined for these regimes. The role of carbon barriers in the delay of mixing both at a thermal and at radiation influence is studied. Diffusion mixing Mo/Si multilayer in the temperature range of 275-450°C was studied. Field of implementation: physics of solid state, irradiation physics.