Korchovyi A. Х-Rays scattering by layered periodical structure and diagnostic of their parameters

Dissertation is devoted to the development of experimental methods of planar multi-layered structures characterization, calculation of basic structural properties of the films from the reflection spectra of X-Rays with the use of the quasi-forbidden reflection (QFR). With the use of the semi-kinematics approximation of dispersion Х-rays theory at the calculations of rocking curves (RC), it is shown that in short-period superlattices (SL) change of intensities correlation of the satellites located from the side of less and greater corners from a zero satellite, depends both on the degree of structural perfection (factor of Debye-Waller, short-range parameter) and from the level of strain deformation of separate layers. The noted fact is caused by the unequivalent phases changes in the structural multiplier of each of the real layers. It is established that for adequate description of RC from multi-layered structures it is necessary to take into account as possible greater number of diffractions parameters as possi-ble, especially in short-period superlattices far from the corner of exact Bragg position. New experimental methods with the use of QFR for the determination of parameters of structures and composition division in the layers of SL were substantiated and verified.