Shalaev R. Photostimulated modification and optical properties of diamondlike carbon films.

The dissertation is devoted to questions of revealing of electromagnetic radiation mechanisms influencing on growth and properties of diamondlike films. The gas phase methods of films obtaining at low pressures and UV-, visible spectrum range irradiation were used in the work. It is determined, that the irradiation of the growing sample surface by the visible laser radiation increases the concentration of atomic hydrogen in a surface layer more than in 2,5 times, because of photosensibilizating processes of energy transmission and dissociation on the excited growth surface. It is shown, that the UV-irradiation of the growth surface of carbon nitride sample reduces an energy barrier, increases the efficiency of nitrogen atoms embedding in the structure of the film and results in the increase of the chemically linked nitrogen concentration in samples. The data obtained is evidence to intensification of etching processes and growth surface reconstruction for diamondlike films in the conditions of its irradiation.