Filimonov S. Perfection of piezoceramic scanners of probe nanomicroscopes

Object of research - processes of scanning of probe nanomicroscopes. Subject of research - piezoceramic scanners of probe nanomicroscopes. The work purpose - development of methods and facilities of perfection of piezoceramics scanners of probe nanomicroscopes and on this basis creation of scanners with the improved descriptions. Dissertation is devoted development of methods and facilities of improvement of descriptions of piezoceramics scanners for probe nanomicroscopes and creation on this basis of competitive standards of such wares. A method is developed for the improvement of keeping of piezoceramics scanners due to diminishing of connection between actuators. Terms were certain allowing to regulate influence of interconnections of aсtuators, piezoceramics scanners, responsible for moving on XYZ to the co-ordinates. Piezoceramics scanners are developed on the basis of bimorph piezoelements with more wide range of scan-out, what the known constructions, that allows to pass sweepable probe microscopes on a new level. Were built and investigational mathematical model and computer model for determination of coefficient of connection between actuators on XYZ to the coordinates of piezoceramic scanners, that allowed to manage parameters for the improvement of their descriptions. A computer model is developed for visualization of moving on the stages of construction of the developed piezoceramics scanners.