Devizenko O. Growth, structure, phase transformation and X-ray optics performance of Co/C nanoscale multilayers

Object: Co/C multilayers with Со layer thickness 0.8 - 7 нм, deposited by magnetron sputtering method on flat polished Si substrates, glass substrates, concave and convex spherical silica substrates. The purpose: determination of growth features, construction and structural transformations, X-ray optics performance of nanoscale multilayers Со/С and investigation of formation capability multilayers efficient of X-ray optical systems with Со/С multilayers operating in the "carbon window" region (at wavelengths 4.4 - 5.0 nm). Methods: X-ray diffractometry, X-ray small angle diffraction, simulating of X-ray small angle diffraction, high resolution transmission electron microscopy, atomic-force microscopy, X-ray methods with synchrotron radiation sources. Results: Interfacial interaction during formation in Со/С multilayers and three stages of interaction were occurred. Temperature ranges for construction and structural transformations in multilayers during thermal annealing with 250-600C were determined. X-ray optics performance of multilayers were studied. Based on multilayers Schwarzschild objective with record high throughput at wavelengths from 4.5 to 5.0 nm was developed. The field of application: solid state physics, physics of thin films, nanophysics