Kharchenko N. Structure and properties of low pressure longitudinal combined discharge in RF and DC electric fields

Українська версія

Thesis for the degree of Candidate of Sciences (CSc)

State registration number

0411U001815

Thesis Registration Form

0411U001815.pdf

Applicant for

Kharchenko Nadiia Dmytrivna

Specialization

01.04.08 - Фізика плазми

Date of defense

11-03-2011

Specialized Academic Board

Д 64.051.12

V.N. Karazin Kharkiv National University

Essay

In this dissertation it is shown that depending on the ratio of the RF and DC voltages applied to the electrodes there are three modes of the combined discharge ignition. Three modes of the low pressure discharge in longitudinal combined electric fields are discovered. Gas breakdown criterion in combined electric fields is derived analytically. The area of the increased electron heating in the RF discharge is shown experimentally. The existence of the transition pressure range where the deviation from the similarity laws of the DC normal mode is observed.

Thesis supervisor

Lisovskiy Valeriy Oleksandrovych

Official opponents

Войценя Володимир Сергійович
Ціолко В'ячеслав Володимирович

Files

aref.doc

dis.doc

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