Prykhodko A. Increase the positioning accuracy of piezoelectric micromanipulation systems

The dissertation is devoted the decision of a problem of increase of measurement accuracy of moving parameters of piezoelectric micromanipulation systems for cellular technologies by creation of measuring and registration techniques of linear and angular micromoving of executive elements of such systems which are based on use of methods and means of videomeasurements with the further videoinformation treatment. The dynamic model of the piezoelectric directing which considers their design features is developed and allows to define linear moving to a nanorange. The mathematical model of working instrument real moving of the threeaxes micromanipulation systems, taking into account cross communications and design features of such systems is created. New methods are created and measuring stand for measurement of linear and angular moving of piezoelectric directing micromanipulation systems are made and allows to raise accuracy of measurement and to expand functionality due to the carrying out of continuous measurements and accumulation of a videoinformation. On the basis of theoretical and experimental researches the compensative model of positioning errors is developed. It allows to reduce the possible error of positioning all working range from 10 microns to 1,5 microns.