Pukach A. Methods and components of computer systems for automatic control of the resistive parameters of microelectromechanical systems

This thesis provides solution for scientific task of development methods and means for automatic control of the resistive parameters of microelectromechanical systems. A method of automatic determination of the electric resistance of MEMS resistive parameters, which is based on the bridge circuit balancing algorithm and appropriate models, and allows to automate the process of determining the electric resistance value of MEMS resistive parameters, is developed. Also the appropriate optimization algorithm for this method is developed. A microcontroller of automatic determination of the electric resistance of MEMS resistive parameters, which is based on microcontroller of Arduino family, and it's specialized software, are developed. Furthermore, the method of automatic determining the approximate value of the electric resistance of MEMS resistive parameters, and the method of automatic determining the value range of the electric resistance of MEMS resistive parameters (which is based on the algorithm and developed circuit model and allows to choose the value range limits of the electric resistance automatically), are developed. All the methods laid the foundation of the developed specialized computer system for automatic control of MEMS resistive parameters, which in total serve as an effective mechanism for solving the task of automatic control of the resistive parameters of microelectromechanical systems.