Toryanick I. Structural state and physical and mechanical properties of ion-plasma AlN-TiB2-TiSi2, (Zr-Ti-Cr-Nb)xN1-x and (Ti-Al-Zr-Nb-Y)xN1-x coatings

The coatings of the multicomponent system AlN-TiB2-TiSi2 were obtained by magnetron sputtering method for the first time, and the multicomponent nitride (Zr-Ti- Cr -Nb)N and (Ti-Al-Zr-Nb-Y )N coatings were obtained by vacuum-arc deposition method from the unit-cast metal cathodes. It is found out that sputtering of the multicomponent target with AlN-TiB2-TiSi2 structure forms amorphous-like structured coating with ordering area ~ 1 nm and viscoplasticity coefficient 0.07. It is proved that the partial pressure affects the formation of the phase composition of multielement (Ti-Al-Zr-Nb-Y)N coatings. At the pressure of p = 0.05 Pa the atmosphere of nitrogen is the least thermodynamically stable, but increasing of the pressure of nitrogen to P = 0.5 Pa puts the system in a more stable state with two-phase nanocrystalline structure. The hardness varies from 34.1 GPa at the lowest pressure to 48.9 GPa at the highest pressure and the nitrogen content is 36 at. %. Field of application: solid state physics, physics of thin films and coatings