Sliusar D. Method of formation of two-dimensional functionally graded coatings

The object of study - the processes of formation of functionally-graded coatings. Target - methods of formation of two-dimensional functionally-graded coatings and technological plasma source for its implementation. Methods of research - the study of local characteristics of the plasma were performed using proven probe methods. Investigation of coated samples was carried out by electron microscopy. Results - the new scheme of formation of two-dimensional functionally graded coatings; a mathematical model to describe the process of formation of two-dimensional functionally-graded coatings; new scheme of sputtering system. Novelty - developed and experimentally confirmed mathematical model of the transfer of the cathode-targets material to the substrate surface; proposed the principle of the inverted magnetron sputtering system with a gas anode, cathode partitioned nodes and axial plasma streams, according to which each of its parts can function as an independent sputtering system; developed a method of using a sputtering system with an extended acceleration zone for sputtering the set cathodes target individual programs; the dependence between the degree of partitioning the cathode-target range and adjust the width of the transition zone between the coated portion of different composition. The degree of implementation - results of the thesis are used in Zaporozhye Machine-Building Design Bureau Progress State Enterprise named after Academician A.G.Ivchenko, the results of the studies used in the National Aerospace University "Kharkiv Aviation Institute". The area of using - aircraft engine building.