Bilokin S. Increase of exactness of diagnostics relief and mechanical descriptions nanosize structures in an instrument-making

Set factors and investigational processes that influence on exactness of diagnosticating relief and mechanical descriptions nanosize structures in an instrument-making. Conducted retrofitting by carbon coverage of instrument atomic-force microscopy, namely - silicic probe; worked out method of removal of electrostatic charge and certain optimal office hours atomic-force microscopy as a result of what the amount of artefacts diminishes in 2,5…3 times, the term of reliable exploitation rises on 25…30% and repetition of results of scan-out in 1,4…3,4 times. There are on the defensive 36 scientific works that contain research results relief parameters and mechanical descriptions nanometrical elements by the method of atomic-force microscopy with the use of probes modified by functional coverages.