Tynkova A. Effect of low-temperature annealing on diffusion changes in the structure of Au/M, Ag/M, Pt/M (M - transition metal) nanoscale films

The thesis is devoted to experimental and theoretical study of low-temperature (0,3Tm - 0,5Tm) treatment influence on processes of mass transfer and phase transitions in Au/Cu, Au/Ni, Ag/Ti, Pt/Fe nanoscale film systems. The results, containing scientific novelty, relate to the laws of ordering processes and "cold homogenization" of chemical composition; the influence of hydrogen, argon and oxygen containing annealing atmospheres on the structure and phase formation; phenomenological description of the low-temperature mass transfer kinetics in bilayer nanoscale compositions. For the investigated "noble metal/transition metal" systems the multistage model of the diffusion was developed as a set of moving bimodal grain boundaries and ordering processes. Using Pt/56Fe/57Fe model system, the values of self- and heterodiffusion activation energies for nanoscale systems were compared and defined the conditions of the transition from grain boundary to bulk diffusion. Developed practical recommendations improving the thermal stability of working film-elements in modern technologies of microelectronics.