Markina O. Improvement of the television measuring system for determining geometrical dimensions of topological elements such as scales and grids

The thesis is devoted to improvement of television measuring system for determining geometrical dimensions of topological elements such as scales and grids. The integrated approach to construction of television measuring system that is based on optical microscope and TV camera with CCD was developed in the thesis. Analysis of factors affecting the accuracy of measurement were conducted and ways to reduce this factors were substantiated. Way of measuring geometrical dimensions of scales and grids were developed and tested. The new objects that can be used as measures for calibrating television measuring system was proposed. Thermographic study of CCD chip and elements of television camera Novus 130VH was conducted. Construction was improved with cooling chamber. Halogen lamp features settings were defined. New light source was proposed, namely miniature LCD screen, the application of which extends the operating range by 35%, increased sensitivity by 30%, reduced power consumption by 9 times (45,5 W to 5 W) compared to a halogen lamp. Use of the LCD as the light source can reduce the overall dimensions of system from 410 х 520 mm2 to 260 х 520 mm2 in the plane (top view) and weight from 2.5 kg to 2 kg (excluding the PC and the optical bench), making the system compact and mobile. The results of experimental measurements of geometrical dimensions for topological elements such as scales and grids by means of television measuring system with an accuracy of ±0,5 micron in measuring the size of 10 microns topological element.