Tolmachova G. Structure and mechanical properties of ion-plasma coatings based on TiN with additions of Zr, Si, Al

The thesis is devoted to revealing of laws of formation of the structure in the vacuum-arc and magnetron coatings of Ti-N, Zr-N, Ti-Zr-N, Ti-Zr-Si-N, Ti-Zr-Al-N and Ti-Al-Si-N, and determines links between the parameters of synthesis, composition, structure, mechanical properties of coatings and the stability of their characteristics to high temperature and ion irradiation. Determined concentration range of components and parameters of deposition in which in coatings are formed three structural types: single-phase nanocrystalline structure on the basis of cubic nitride (structural type NaCl); nanocomposite consisting of cubic nitride nanocrystals as surrounded by an amorphous phase; amorphous. By using developed nanoindentation technique and the console CSM for thin hard coatings showed that the mechanical properties of the ion-plasma coatings are determined by their structure type. The highest hardness has nanocomposite coatings with low concentration of amorphous phase, and the least - coatings with amorphous structure. By vacuum-arc deposition obtained hard (35-45GPa) coatings (Ti, Al)1-xSixN with different structural type and high thermal stability.