Rogoz V. Physical and mechanical properties and microstructure of coatings based on niobium nitride doped Si and Al.

Українська версія

Thesis for the degree of Candidate of Sciences (CSc)

State registration number

0418U000628

Thesis Registration Form

0418U000628.pdf

Applicant for

Specialization

  • 01.04.07 - Фізика твердого тіла

23-02-2018

Specialized Academic Board

Д 55.051.02

Sumy State University

Essay

The dissertation is devoted to the complex study of the dependence of surface morphology, structural and substructural characteristics, elemental composition and mechanical properties of nanocomposite coatings NbN, Nb-Si-N и Nb-Al-N on the technological conditions of their deposition. The features of the transition from a nanocrystalline coating to a nanocomposite coating with an amorphous layer between nanocrystallites - by varying the dopant concentration of silicon and aluminum, respectively. It is shown that an increase in the negative potential at the substrate at the deposition process positively affects the mechanical properties of niobium nitride. An increase in hardness from 28 GPa to 29.5 GPa and an elastic modulus from 240 GPa to 290 GPa is due to an increase in the concentration of the harder phase in the coating composition.

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Files

aref.pdf

dis.pdf

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