Maleev M. Features of the process of coatings formation from accelerated C60 ion fluxes

A complex investigation of the features of interaction of accelerated fullerene ions with the surface of a solid under irradiation of ITO, Si, SiO2, and glassy-carbon targets in the energy range of 2.5-20 keV is performed. The processes of erosion of irradiated targets have been studied, the regularities in the formation of the structure of carbon films obtained from the molecular and ionic C60 fullerene fluxes, their mechanical and electrical properties have been determined. It has been experimentally determined that the increase in the energy of the deposited ions (Ei) leads to a change in the growth of carbon films on the erosion of the target itself. Еhe structure of carbon films with an increase in the energy of the ions varies from an amorphous diamond-like to a nanocomposite with inclusions of graphite nanocrystals. The resulting carbon films have a high hardness, which decreases with an increase in beam energy. The temperature dependence of the electrical conductivity of carbon films in the temperature range from room temperature to the boiling point of liquid nitrogen has revealed three mechanisms of charge transfer, which prevail in films with a different structural state.