Zakiev V. Instrument for non-contact measurement of products surface geometrical parameters by interferometric method

The dissertation is devoted to the development of an automated instrument for non-contact measurement of surface micro- and nanotopography, its tree-dimensional representation, determination of roughness parameters and parameters characterizing the features of surface shape. Linear precision actuator of the reference mirror with a nanometre displacement step was developed. Actuator control is carried out by a specially designed electronic control board in accordance with the developed algorithms and software. The principle of profilometer operation is based on the intensity registration of interference fringes at each point of the charge-coupled device (CCD) at a zero optical path difference in the interferometer for the corresponding position of the moving mirror. The instrument automation is provided by specially designed software used to control, configure, collect, process and save data, as well as for filtering and three-dimensional visualization of the obtained results. To provide the necessary metrological and technical characteristics, a methodology and software for automatic instrument calibration have been developed. The essence of calibration procedure is to find the number of moving mirror steps which is necessary to shift the interference fringe on half a wavelength of the light source. Experimentally approved its practical application for many scientific and practical tasks.