Zaslavs'kyj O. Structure formation laws in vacuum condensates of oxides of metals of III and IV groups and their binary compositions

Principles of structures formation in vacuum condensates of oxides of metals of III and IV groups and their binary compositions prepared by pulsed-laser and electron-beam evaporation, have been determined by means of X-ray diffraction and spectrum analysis, scanning and transmission electron microscopy, electron diffraction investigation and mathematical modelling. The influence of substrate temperature on polymorphism of individual oxides in vacuum condensates has been fixed and temperature ranges of polymorphic modifications existence for individual oxides have been found. The influence of substrate temperature and radius of the three-charged cation on stabilization of the fluorite structures in oxide vacuum condensates has been established. The temperature-concentration ranges of different structure type solid solutions formation and thermal stability of this solid solution have been determined. The influence of substrate parameters on the formation of metastable phases and solid solutions hasbeen studied . The synthesis conditions of high-symmetry structure compounds in oxide vacuum condensates on evaporation of mechanical mixes of initial components have been optimised. The influence of substrate temperature on nonstoichiometric phase formation has been established. The comparison of structure formation lows for electron-beem- and laser-condensates has been carried out and the influence of substrate speed on the change of the condensation mechanism has been defined. The advantage of the laser evaporation method for coatings with demand properties development was shown. The model of structure formation in oxide vacuum condensates was submitted and the information on structure zones in oxide vacuum condensates has been essentially developed.