Pavlova O. Phase composition, structure and properties formation of Co, Mn, Ni, Ti, Ta, Pt transition metal silicides on monocrystalline silicon

Українська версія

Thesis for the degree of Doctor of Science (DSc)

State registration number

0507U000616

Thesis Registration Form

0507U000616.pdf

Applicant for

Pavlova Olena Petrivna

Specialization

01.04.07 - Фізика твердого тіла

Date of defense

24-10-2007

Specialized Academic Board

Д 26.207.01

Institute for Problems in Materials Science

Essay

The thesis is carried out in the film material science field and is devoted to the decision material science and technological tasks, connected with the problem of the miniaturization of the chips and microdevices and the transfer to the nanotechnology, the creation of the new materials answering the requirements of the nanotechnology. The regularities of the diffusion formation processes of the stable nanodimensional silicide films of the Co, Mn, Ni, Ті, Та, Pt transition metals on the monocrystalline silicon are established by complex up-to-date physical material science methods.

Thesis supervisor

Sidorenko Sergiy Ivanovich

Official opponents

Макара Володимир Арсенійович
Пугачов Анатолій Тарасович
Сміян Олег Дмитрович

Files

aref.doc

dis1.doc

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dis12.doc

dis13.doc

dis2.doc

dis3.doc

dis4.doc

dis5.doc

dis6.doc

dis7.doc

dis8.doc

dis9.doc

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