The object of study - the processes of electrochemical synthesis of thin functional coatings of silver, gold and alloys of Mo and W, as a replacement for gold, for microelectronics. The purpose of the study is to solve scientific problems of technical electrochemistry to establish the foundations of the electrochemical synthesis of functional materials (for example, coatings of silver and gold in the Microelectronics Technology) based on the development of ideas about the influence of electrochemical kinetics at structure and properties of deposits and predictive control of using the theory of electrochemical active complexes and hypotheses about the correlation relationship of functional properties of the fundamental kinetic characteristics. Methods of research - voltammetry, chronopotentiometry, mathematical modeling, spectrophotometry, optical and electron microscopic metallography, X-ray analysis, profiling, electrochemical impedance spectrometry, elemental analysis of the corrosion products, methods for measuring the electrical conductivity, microhardness, adhesion, wear resistance, roughness, porosity, strength, solderability, ultrasonic microwelding, etc. Theoretical and practical results: The thesis deals with the solution of the fundamental problem of the modern electroplating technology of functional materials by the controlled synthesis of metal silver and gold coatings with tailor-made properties for microelectronics. The range of the stable process of functional deposition (minimal dynamic instability of the system) (the electrochemical resistance is 4RT/anFjlim under polarization with current j=0.4-0.6jlim) where the most favorable energetic of preferential crystal face growth at the minimal work of surface formation is realized has been determined; this allows one to obtain in any electrolyte deposits of electrolytic gold and silver whose physicochemical properties are stable. A new law governing electrochemical kinetics has been established: the discharge of different coordination silver (I) and gold (I) ions occurs by a common mechanism. A self-consistent parameter, which is the electrochemical resistance of a system, the nature of complex ion and electroactive complex (EAC) formation conditions, is proposed as a correlation parameter for the prediction of the functional properties of silver and gold coatings. New engineering solutions have been found: alternative ways of replacing contact gold by alloys based on refractory metals with iron subgroup metals have been developed; a new selective method for the electrochemical regeneration of silver has been developed; electrolytes have been optimized (the electrolyte composition, the nature of EAC, the range of stable electrodeposition, electrolysis conditions have been justified); the problems of contact exchange, passivation of anodes, increasing the service life of buffer electrolytes have been solved; these electrolytes have been introduced in technologies for the deposition of conducting contact layer of gold, silver, tungsten and molybdenum alloys and competitive articles of micro- and nanoelectronics with considerable (up to 15%) reduction of rejected products. The scientific results obtained in the study of correlation between the electrochemical kinetics and the structure and morphology of deposits, the conditions established for sustainable regime of electrodeposition of metal coatings with functional properties, proposed principles for selection of components of the electrolyte, the criteria for estimation and prediction of deposition properties are new and original. Results are introduced in the technologies controlled functional electroplating. Sphere (region) use - technology of galvanic coatings for microelectronics, microsystems engineering, electrochemical material science. Keywords: functional coating, silver, gold, coordination compound, electroreduction, kinetics, mechanism, electrochemical resistance.
