Perevertaylo V. Resonant ultrahigh-frequency systems in pre-breakdown electric mode

The scientific and applied problems of development of scientific and technical bases of construction and practical use of resonant ultrahigh-frequency systems in pre-breakdown electric mode for technological equipment are solved in the thesis. In this regard, the following subjects have been studied: - construction principles and characteristics of "split ring" type resonant ultrahigh-frequency systems with its modification at high pressure with wireless microwave power consumption; - construction principles and characteristics of waveguide-type resonant ultrahigh-frequency systems with transverse electric field at low pressure with special dielectric insertion; - characteristics of the fast neutral atoms flux reflected from the resonator discharge chamber surface and its elements during ion bombardment, in particular the particles reflection coefficient RN and energy reflection coefficient RE for oxygen and argon ions at different flux incidence angles and respective effect inside the discharge chamber on resonator elements. The following new scientific results were obtained: For the first time results of the electric field strength simulation in resonator of the "split ring" type designed for the resonant frequency of 2.45 GHz with a wireless power supply for operation at high pressure have been obtained. The maximum field strength occurs in the localized region of the resonator gap, which was confirmed experimentally. For the first time the omnidirectional resonant ultrahigh-frequency system (as a modification of the "split ring" type resonator) for the operating frequency of 2.45 GHz was developed and the results of the electric field strength simulation in its gap depending on the microwave power value were obtained. For the first time results of the electric field strength in the waveguide-type resonator for main mode of H11 type by physical and topological 3D simulation have been obtained which allowed to develop and design an ultrahigh-frequency resonator to operate at 2.45 GHz at low pressure for technological purposes: starting from gas excitation and/or ionization and up to beams of neutral particles generating. Application of the developed models allows to increase accuracy of predesign and the automated construction and final design. For the first time results of electric field strength (in the waveguide-type resonator in the pre-breakdown electric mode) dependence on microwave generator power taking into account the walls material conductivity of the waveguide chamber and the whole system geometry by physico-topological 3D simulation have been obtained. Such approach allowed to most accurately determine the microwave power required to breakdown voltage in the system, that is reduced the power supply of the developed waveguide resonator. The results of the calculation were confirmed by experiment. The waveguide-type resonator as a gas activator was successfully tested in experimental industrial production as part of a microwave magnetron sputtering system (MSS). Such technological realization allowed to reduce the MSS operating pressure, which was a problem before integration of the proposed resonant ultrahigh-frequency system. There are results of new research and the obtained data on the reflection coefficients of particles and energies for oxygen and argon ions at different incidence angles on the metal parts of the system are realized in the new technical solution.