Kukla O. Transport processes of charge and mass into microelectronic sensors and sensor arrays for monitoring of toxic substances in environmental

Silicon EIS-structures with рH-sensitive layer of silicon nitride and thin films of electroconductive polymer polyaniline on a silicon substrate. To investigate mechanisms of a charge and mass transfer in a liquid medium of ferment sensor and on the electrolyte-solid boundary and also processes of electrical transfer in polyaniline films as well as influence of ammonia adsorption on them. Methods used are capacity effect of a field, measurement a C-V characterictics and frequent dependences of impedance of EIS-structures, I-V, temperature, kinetic and concentration dependences of polyaniline film conductivity, microscopy of atomic forces. The parameters of diffusion mass- and charge transportation allowing for generations and recombinations of reagents of ferment reaction are calculated. The possibility of the analysis of ferment activity by C-V measurement method for an array of the silicon EIS-structures is proved. The use of multi-ferment analysis for recognition of heavy metals ions and organic pe sticides in water solutions as well as qualitative and quantitative determination of components in mixture of ions Cu, Co, Cd, Ni, Zn, Pb, Sn, Sr was shown. The physico-chemical model of interaction of ammonia and polyaniline films is developed. The mechanism of convertibility of ammonia adsorption was suggested and the mechanism of its modulation influence on a level of film conductivity was established. The analytical view of the film resistance dependence on ammonia concentration was found. The parameters of degradation, aging and temperature regeneration of sensitive polyaniline layers were established.