Ryabukhin O. Electrodynamic models of resonator sensors in microwave diagnostics of semiconductors

The object is an interaction process of microwave resonator sensors (RS) of aperture type with layered semiconductor structures; the aim is development of RS’s electrodynamic models; the methods are: method of partial areas, Green’s functions, Galerkin’s method, methods of search of the transcendental equations’ complex roots, solutions of linear algebraic equations’ systems and problems of multivariate optimization, an experimental research of microwave RS characteristics by transmission method; Novelty and results are: for the first time rigorous numerical - analytical electrodynamic model of aperture RS is offered and designed, the approximate model of capacitive type microwave RS is advanced, single-mode approach for RS’s models of waveguide type is advanced; range of application of approximate models for description of waveguide and capacitive types RS are determined; extreme character of RS’s quality factor and resonant frequency dependences on a insertion degree of layered semiconductor samplesin a sensor field is theoretically defined and experimentally confirmed; results may be introduced in scientific research institutes and design offices; the range is the microwave diagnostics of semiconductors.