Galuza A. Optical properties of transparent film - substrate (Si, Al2O3, GGG, glass ceramic) structures with surface and interface layers

Object - structures based on sapphire, GdGaG, glass ceramic, Si and SiO2; aim - study of regularities of surface and interface layers formation; methods - ellipsometry, electron microcsopy, interference of polarized rays; results, novelty - 1) it is shown that there is a damaged nano layer on the surface of standard substrates with refractive index close to the one of the bulk material, 2) real structure of Si-SiO2 -Si system is found out, it turned out complicated with interface and rough surface oxide layers, main Si layer turned out porous, 3) some peculiarities of the main ellipsometric equation that significantly complicate solving the inverse problem of ellipsometry via computer are discovered, 4) new effective method for solving reverse ellipsometric problem is developed; field of implementation - physical optics, solid state physics, thing films physics