Maryns'kyj A. Hard gradient coatings and electron-beam physical vapor deposition technology for their deposition.

This work deals with the development and study of the process for electron beam physical vapour deposition in vacuum of hard gradient protective coatings based on titanium, chromium and boron carbides as well as with the study of basic characteristics and properties of these coatings. It's demonstrated that the process of electron-beam evaporation of the components mixture from a single source with their condensation in vacuum can be enable to synthesize carbides compositions with the formation of carbides based hard coatings directly on the substrates. The formation of hard coatings with planed and variable in wide range through the thickness composition and properties is possible as well as of complex coatings from simple components with good repeatability of the results. The variation of the composition and properties can be carried out with a change in initial materials concentrations as well as with the process parameters modifications. The technology for the simultaneous evaporation of multi-components mixture from a single source with the deposition of complex carbide coatings is created. It provides a repeatability and a reliability of the results, make unnecessary the use of ready carbide compositions as initial materials, reduce the process technological time and improve it's energy effectiveness.