Alimov S. Dynamics of plasma-surface system in magnetron type discharges

Українська версія

Thesis for the degree of Candidate of Sciences (CSc)

State registration number

0403U002202

Thesis Registration Form

0403U002202.pdf

Applicant for

Specialization

  • 01.04.08 - Фізика плазми

23-05-2003

Specialized Academic Board

Д 64.051.12

V.N. Karazin Kharkiv National University

Essay

Theses deals with study of physical processes, which occur in near surface layer of plasma and at a solid surface in magnetron type discharge. The effect of cone like formations growth on the cathode surface were found and its simulation was performed. The influence of this phenomenon on the discharge characteristics was studied. Ion assisted synthesis of chemical compounds in the transitional layer on a surface of small sized disperse materials under influence of magnetron discharge plasma. The results may be applied to develope plasma based methods of nanocomposite productions.

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Files

Aref.doc

Dis.doc

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