Starodubtsev N. Operational control of processing of semi-conductor plates in manufacture of devices of electronic engi-neering

Object - technological process of the automatic control of thickness of plates; purpose - increase of productivity of technological process of machining of plates and qualities of their surface due to development of the automatic operational control of thickness of plates; methods - methods of mathematical modelling of physical processes in semiconductors, the theory of automatic control and optimization, methods of applied programming, methods of imitating modelling; results - are received parities for definition of specific pressure necessary for alignment of plates before grinding, - the mathematical model is developed and modelling process of machining of plates is carried out, - the method of the automatic operational control of thickness of plates is developed during processing, - the computer model of the automatic operational control of thickness of plates is developed, - technological process of the automatic control of thickness of plates and recommendations for creation of a workplace of theautomatic operational control of thickness of plates is developed; innovation - the method of calculation of residual pressure in a multilayered plate with isotropic layers on a deformation curve for the first time is developed, - for the first time is developed mathematical model and modelling process of machining of plates is executed, - necessity of creation for the first time is proved and the theoretical substantiation of a method of the automatic control of thickness of plates is executed during performance of operation of their machining, - has received the further development capacitor a method of measurement of thickness of plates, - the computer model of the automatic operational control of thickness of plates for the first time is developed and investigated; introductions - results are introduced at the KSEF him T.G.Shevchenko, Kharkov; usage sphere - enterprises for manufacture of element base of electronic engineering and branch scientific research institutes.