Sapryka A. The increase in the discharged lamps efficiency in a step mode

Object of investigation: processes in exposure chambers with discharged lamps of high and ultrasonic pressure in a step mode. Objective: the increase in the discharged lamps efficiency in radiating and lighting installation due to applying the step mode and determining the most favourable conditions of its realization. Methods of investigation: theoretic, photometric, electric, oscillographic, spectrophotometric, and methods of digital photography prosseded oh PC. Have been developed: methods of increasing lamps work spectral and energetic efficiency in a step mode for radiating installation with maintaining of chamber temperature parameters and lamps durability. Have been applied: photolithography installation RS-130 reconstruction. This reconstruction ensured the increase in their work efficiency in a step mode. Area of application: lighttechnic production, optical technologies.