Rubish V. Modification of chalcogenide vitreous semiconductors based on arsenic and antimony

The dissertation paper is dedicated to research of the structure and properties of glasses and films in As(Sb)-S-(Se) systems and their transformation depending on chemical composition, obtaining conditions and under the influence of optic radiation and annealing as well as applicability of these materials as non-organic resists with high resolution for holography, laser and optic lithography. Physico-chemical parameters of glasses were investigated, an interrelationship of these parameters compo¬sition dependences peculiarities with kinetic state diagrams and the glass structure has been found. As was shown that all investigated glasses and films have a microheterogeneous structure. The influence of illumination and annealing on structure and optical properties of As40S60-xSex (0? x ?20) films has been studied. It’s been shown that their action leads to polymerization of As4S(Se)4 and S(Se)n molecular groups in the glass matrix which is accompanied by absorption edge shift to the longwave range and refraction index increment. It was determined that exposing antimony selenide films to a focused laser beam leads to their crystallization. Film amorphization processes and annealing influence on the film structure and optical properties have been studied. Holographic diffraction gratings, and optical disc originals have been produced on basis of As40S60-xSex (0? x ?20) non-organic resist.