Bizyukov I. Sputtering and surface modification of tungsten layers by bombardment with deuterium and carbon beams

Українська версія

Thesis for the degree of Candidate of Sciences (CSc)

State registration number

0407U001920

Applicant for

Specialization

  • 01.04.20 - Фізика пучків заряджених частинок

24-04-2007

Specialized Academic Board

Д 64.845.01

National Science Center "Kharkiv Institute of Physics and Technology"

Essay

Dissertation presents results of investigations of sputtering and elemental modification of the surface as a result of bombardment tungsten surface with ion beams of carbon, carbon and helium, carbon and deuterium. Influence of roughness on sputtering of surface and implantation of carbon has been considered. Transition from sputtering to carbon layer deposition occurring due to increase of carbon fraction in incident flux has been studied by experiment and by numerical simulations. One has shown that interaction of ion beams with surface is governed primarily by kinetic processes. Influence of chemical processes on sputtering and implantation in this system can be neglected

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