Shurygin F. Technology for obtaining indium arsenide microcrystals stable to the impact of high-energy electron irradiation.

Thesis is devoted to the problem of development of methods for stabilization of electrophysical parameters of semiconductor material InAs, aiming at increasing its functional capabilities and application field. Major concept is based on obtaining semiconductor microcrystals of indium arsenide with given doping level, at which free charge carrier concentration change under the impact of irradiation with high-energy electrons will be minimal. For the first time the possibility of doping the indium arsenide microcrystals with stannum impurity in broad concentration range during their vapour phase deposition in chloride system InAs-Sn-HCl has been demonstrated by means of mathematical simulation. Technique of obtaining stannum doped indium arsenide microcrystals having the free charge carrier concentration from 5·1016 cm-3 to 1·1019 cm-3 was realized. Optimal level of indium arsenide microcrystals' doping, at which free charge carrier concentration change under irradiation with high-energy electrons is minimal and for the case of electrons' energy being of the order of 13 MeV equals to 1018 cm-3, has been experimentally determined. InAs<Sn> microcrystals obtained with the help of vapour phase deposition in chloride system have found practical application in magnetic field sensors of Hall type for solving magnetic measuring tasks. InAs<Sn> microcrystal-based magnetic field sensors are characterized by tiny dimensions, which is important when they are used in magnetic measuring devices. Such magnetic field sensors were used for the development and producing of magnetometric devices, such as differential magnetometer, developed on the order from Scientific Research Laboratory for Materials of Solid-State Microelectronics of Drohobych Ivan Franko State Pedagogical University, and magnetometric module for spacecrafts, produced on the order from Dnipropetrovsk State Enterprise "Production Association Southern Machine-Building Plant".